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Sputtering Target

Sputtering Target

Sputtering target of AGC Ceramics

Based on our fine ceramics technology cultivated over the years, we AGC ceramics produce sputtering target throughout total process such as raw materials processing, forming, sintering, machining and bonding. Therefore, the supply of the stable and high quality sputtering target as well as large size of plate with maximum size of 3.8m (in length) or 1.4m( in width) is possible to provide.

In addition, in response to the new current of adopting high efficient rotary cathode in late years, we provide integral molding type, thermal spray type and bonding type of cylindrical target by utilizing our original technology. The production of the cylindrical target with maximum size up to 3m in total length is possible.

On the other hand, we implement technical backup as the customer support such as film evaluation technology, deposition technology and arcing (abnormal discharge) prevention technology.

Planer type of sputtering target

Planer type of sputtering target

Cylindrical sputtering target

Cylindrical sputtering target

Cylindrical target in a chamber
The cylindrical target discharging electricity

Table of main products (Sputtering Target)

Material/
Product
name
Shape
(※1) 
Material function Function of sputtering film
(oxide film)
Main application
P C DC/MF
depo.
Others Dura-
bility
RI
(※2)
Film
(※3)
Si
type
SC   SiO2 rapid depo. 1.46 A
  • Anti-reflective film for display
    and touch panel
  • Protective film for IR
    reflective glass of vehicle
    and building
  • Optical film
Stable discharge
SX   Low
arcing 
1.7 A
ST Variable compo. 1.7~
2.0
A
Nb
type
NBO Nb2O5
rapid depo.
2.3 A
Ti
type
TXO TiO2 rapid depo. 2.45 A
Zn
type
SZ ZnO-SnO2
rapid depo.
  2.0 A
  • Dielectric layer for Low-E
  • Intermediate-refractive film
    for optical film, e.g., Anti-
    reflective film
AZ ZnO-Al2O3
rapid depo.
  2.0 A
GZO   few nodule   1.9 C
  • Optical films for displays
  • Transparent conductive films
    for solar cells, electric vehicle
    and film preventing static
    electricity
AZO few nodule   1.9 C

All productions above mentioned can be used with DC/MF power supply.

  • 1  P:Planer type    C:Cylindrical type    △:Under development
  • 2  Reflective Index
  • 3  A:Amorphous    C:Crystal

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